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Smart Structures and Systems
  Volume 29, Number 5, May 2022 , pages 705-714

Dynamic analysis of magnetorheological elastomer sandwich MEMS sensor under magnetic field
Hossein Akhavan, Javad Ehyaei and Majid Ghadiri

    In this paper, the effect of magnetic field on the vibration behavior of a Magnetorheological elastomer (MRE) sandwich MEMS actuated by electrostatic actuation with conductive skins are examined within the multiple scales (MMS) perturbation method. Magnetorheological smart materials have been widely used in vibration control of various systems due to their mechanical properties change under the influence of different magnetic fields. To investigate the vibrational behavior of the movable electrode, the Euler-Bernoulli beam theory, as well as Hamilton's principle is used to derive the equations and the related boundary conditions governing the dynamic behavior of the system are applied. The results of this study show that by placing the Magnetorheological elastomer core in the movable electrode and applying different magnetic fields on it, its natural vibrational frequency can be affected so that by increasing the applied magnetic field, the system's natural frequency increases. Also, the effect of various factors such as the electric potential difference between two electrodes, changes in the thickness of the core and the skins, electrode length, the distance between two electrodes and also change in vibration modes of the system on natural frequencies have been investigated.
Key Words
    magnetorheological elastomer; MEMS actuator; method of multiple scales; nonlinear dynamics; perturbation; sandwich beam
Hossein Akhavan, Javad Ehyaei and Majid Ghadiri: Faculty of Engineering, Department of Mechanics, Imam Khomeini International University, 34148-96818, Qazvin, Iran

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