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Structural Engineering and Mechanics Volume 56, Number 3, November10 2015 , pages 461-472 DOI: https://doi.org/10.12989/sem.2015.56.3.461 |
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Brief and accurate analytical approximations to nonlinear static response of curled cantilever micro beams |
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Youhong Sun, Yongping Yu and Baochang Liu
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| Abstract | ||
| In this paper, the nonlinear static response of curled cantilever beam actuators subjected to the one-sided electrostatic field is focused on. By assuming the deflection function of electrostatically actuated beam, analytical approximate solutions are established via using Galerkin method to solve the equilibrium equation. The Pull-In voltages which determine the stability of the curled beam actuators are also obtained.These approximate solutions show excellent agreements with numerical solutions obtained by the shooting method and the experimental data for a wide range of beam length. Expressions of these analytical approximate solutions are brief and could easily be used to derive the effects of various physical parameters on MEMS structures. | ||
| Key Words | ||
| MEMS; Galerkin method; large deformation; analytical approximation | ||
| Address | ||
| Youhong Suna, Yongping Yu and Baochang Liub: College of Construction Engineering, Jilin University, Changchun 130026, P.R. China | ||