Dynamical behaviour of electrically actuated microcantilevers

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	Coupled Systems Mechanics Volume 4, Number 3, September 2015 , pages 251-262 DOI: https://doi.org/10.12989/csm.2015.4.3.251
	Full Text PDF Dynamical behaviour of electrically actuated microcantilevers
	Hamed Farokhi and Mergen H. Ghayesh
Abstract
	The current paper aims at investigating the nonlinear dynamical behaviour of an electrically actuated microcantilever. The microcantilever is excited by a combination of AC and DC voltages. The nonlinear equation of motion of the microcantilever is obtained by means of force and moment balances. A high-dimensional Galerkin scheme is then applied to reduce the equation of motion to a discrete model. A numerical technique, based on the pseudo-arclength continuation method, is used to solve the discretized model. The electrostatic deflection of the microcantilever and static pull-in instabilities, due to the DC voltage, are analyzed by plotting the so-called DC voltage-deflection curves. At the simultaneous presence of the DC and AC voltages, the nonlinear dynamical behaviour of the microcantilever is analyzed by plotting frequency-response and force-response curves.
Key Words
	microcantilevers; electrically actuated; pull-in instability; dynamical behaviour
Address
	Hamed Farokhi: Department of Mechanical Engineering, McGill University, Montreal, Quebec, Canada H3A 0C3 Mergen H. Ghayesh:School of Mechanical, Materials and Mechatronic Engineering, University of Wollongong, NSW 2522, Australia