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Coupled Systems Mechanics
  Volume 4, Number 3, September 2015, pages 251-262

Dynamical behaviour of electrically actuated microcantilevers
Hamed Farokhi and Mergen H. Ghayesh

    The current paper aims at investigating the nonlinear dynamical behaviour of an electrically actuated microcantilever. The microcantilever is excited by a combination of AC and DC voltages. The nonlinear equation of motion of the microcantilever is obtained by means of force and moment balances. A high-dimensional Galerkin scheme is then applied to reduce the equation of motion to a discrete model. A numerical technique, based on the pseudo-arclength continuation method, is used to solve the discretized model. The electrostatic deflection of the microcantilever and static pull-in instabilities, due to the DC voltage, are analyzed by plotting the so-called DC voltage-deflection curves. At the simultaneous presence of the DC and AC voltages, the nonlinear dynamical behaviour of the microcantilever is analyzed by plotting frequency-response and force-response curves.
Key Words
    microcantilevers; electrically actuated; pull-in instability; dynamical behaviour
Hamed Farokhi: Department of Mechanical Engineering, McGill University, Montreal, Quebec, Canada H3A 0C3
Mergen H. Ghayesh:School of Mechanical, Materials and Mechatronic Engineering, University of Wollongong,
NSW 2522, Australia

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